4860_模擬橡膠密封質(zhì)量流量計(51C41L)

模擬橡膠密封;

流量范圍:50 sccm-40 slpm;

精度:±3.0% of FS;±1.0% of FS;

壓力:0-150 psig;

閥門:

閥門常閉:<0.3V;

閥門常開:>4.8V